PiTrans - AlScN – Entwicklung neuartiger piezoelektrischer Materialien

PROJEKTTITEL

PiTrans – Entwicklung von AlScN-Schichten für die nächste Generation von piezoelektrischen Hochfrequenzfiltern

LAUFZEIT

2015 – 2020

FÖRDERMITTELGEBER

Fraunhofer Attract Stipendienprogramm

ZIELE

• Entwicklung von AlScN-Schichten für die Hochfrequenzfilter der nächsten Generation
• Hochwertiges gesputtertes AlScN mit bis zu 40% Sc
• Piezoelektrisches Material und elektroakustische Gerätecharakterisierung

PUBLIKATIONEN

A. Ding; N. Kurz; R. Driad; Y. Lu; R. Lozar; T. Christoph; L. Kirste; O. Ambacher and A. Žukauskaitė, Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators, IEEE International Ultrasonics Symposium 2019, 6-9 Oct. 2019, DOI: 10.1109/ULTSYM.2019.8926095

N. Feil; N. Kurz; D. Urban; A. Altayara; B. Christian; A. Ding; A. Žukauskaitė and O. Ambacher, Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films; IEEE International Ultrasonics Symposium 2019, 6-9 Oct. 2019, DOI: 10.1109/ULTSYM.2019.8925570

N. Kurz; A. Ding; D. F. Urban; Y. Lu; L. Kirste; N. M. Feil; A. Žukauskaitė and O. Ambacher, Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators; Journal of Applied Physics 126, 075106 (2019); https://doi.org/10.1063/1.5094611

M. Baeumler; Y. Lu; N. Kurz; L. Kirste; M. Prescher; T. Christoph; J.  Wagner; A. Žukauskaitė and O. Ambacher, Optical constants and band gap of wurtzite Al_1−xSc_xN/Al₂O₃ prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41; Journal of Applied Physics ; Nr. 126; Art.: 045715 (07/2019); doi.org/10.1063/1.510104.

A. Ding; M. Reusch; Y. Lu; N. Kurz; R. Lozar; T. Christoph; R. Driad; O. Ambacher; and A. Žukauskaitė, Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators; 2018 IEEE International Ultrasonics Symposium (IUS) (IEEE, 10/2018); pp. 1–9.; doi.org/10.1109/ULTSYM.2018.8579751.

Y. Lu; M. Reusch; N. Kurz; A. Ding; T. Christoph; M. Prescher; L. Kirste; O. Ambacher; A. Žukauskaitė, Elastic modulus and coefficient of thermal expansion of piezoelectric Al_1−xSc_xN (up to x = 0.41) thin films; APL Materials; Nr. 6, Art.: 076105 (07/2018); doi.org/10.1063/1.5040190.

N. Kurz; Y. Lu; L. Kirste; M. Reusch; A. Žukauskaitė; V. Lebedev; and O. Ambacher, Temperature Dependence of the Pyroelectric Coefficient of AlScN Thin Films, Phys. Status Solidi A; Online First, Art. 1700831 (03/2018); p. 7, doi.org/10.1002/pssa.201700831.
 

Y. Lu; M. Reusch; N. Kurz; A. Ding; T. Christoph; L. Kirste; V. Lebedev; A. Žukauskaitė, Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films; Phys. Status Solidi; A. 215; Nr. 9, Art. 1700559 (11/2017); p. 6, doi.org/10.1002/pssa.201700559.

M. Reusch; S. Cherneva; Y. Lu; A. Žukauskaitė; L. Kirste; K. Holc; M. Datcheva; D. Stoychev; V. Lebedev; and O. Ambacher, Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices; Appl. Surf. Sci.; A. 407 (06/2017); p. 307–314, doi.org/10.1016/j.apsusc.2017.02.147.