SUPREME – Superconduction European Quantum Pilot Line

Main chamber of the cryogenic wafer prober with 200-mm wafer on a chuck which is moved under the probe card.
© Fraunhofer IAF
View into the main chamber with a 200-mm wafer in the center on the chuck which is moved under the probe card. The system is testing a wafer from the QUASAR project, in which researchers are developing single-electron transistors (SETs) based on silicon quantum wells to be used as a device for spin qubits.

SUPREME aims to develop stable fabrication processes for superconducting quantum chips with improved reproducibility and yield. The central goal is to develop robust technologies and make them widely accessible to industry and academia. A key milestone will be the fabrication and demonstration of a 3D-integrated qubit module with 200 qubits. This will demonstrate the increased stability, higher yield, and improved reproducibility of the core fabrication processes for superconducting quantum chips. The first project phase began in early 2026, spans three and a half years, and brings together 23 partners from eight member states.

SUPREME focuses on the development and validation of key quantum processes, including angle-evaporated and etched junctions, 3D integration, and hybrid processes for applications in quantum computing, quantum sensing, and quantum communication. The goal is to achieve Technology Readiness Level (TRL) 6 and Manufacturing Readiness Level (MRL) 6.

Contribution of Fraunhofer IAF

Fraunhofer IAF’s task is to measure the quality of qubit devices. To this end, the institute operates one of the world’s few cryogenic facilities for the statistical characterization of such devices on 150-mm to 300-mm wafers. The so-called on-wafer prober enables the fully automated characterization of large quantities at measurement temperatures below 2 K (-271.15 °C). Based on this measurement data, the production of qubit devices can be systematically optimized and subsequently scaled up significantly.

PROJECT TITLE

SUPREME – Superconduction European Quantum Pilot Line

DURATION

2026–2029 

FUNDING SOURCE

EU CHips Joint Undertaking

PROJECT COORDINATOR

VTT Technical Research Centre of Finland

PROJECT MANAGER (Fraunhofer IAF)

Dr. Dirk Schwantuschke

OBJECTIVE

  • Establishment of a stable and scalable pilot line for superconducting quantum chips for pre-commercial operation.
  • Fabrication and demonstration of a 3D-integrated qubit module with 200 qubits.
  • Development and validation of key quantum processes, including angle-evaporated and etched junctions, 3D integration, and hybrid processes for applications in quantum computing, quantum sensing, and quantum communication.

Consortium

  • Teknologian Tutkimuskeskus VTT Oy (Coordinator)
  • IQM Finland Oy
  • Arctic Instruments Oy
  • Quantware B.V.
  • Single Quantum BV
  • Nederlandse Organisatie Voor Toegepast Natuur
  • Qphox BV
  • Technische Universiteit Delft
  • Technische Universitaet Muenchen
  • Fraunhofer-Gesellschaft
  • Infineon Technologies AG
  • Peak Quantum GmbH
  • Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaft
  • Leibniz-Institut Fuer Photonische Technologien E.V.
  • Commissariat a l’energie Atomique et Aux Energies Fr
  • Silent Waves
  • Alice & Bob
  • Amires – the Business Innovation Management Institute CZ
  • Universita Degli Studi Di Napoli Federico II
  • Fondazione Bruno Kessler
  • QilimanJaro Quantum Tech SL 
  • Instituto De Fisica De Altas Energias
  • Silicon Austria Labs GmbH

Further Information

 

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